For the Inventor, By the Inventor

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Waterloo, Canada

Mks Inc.

USPTO Granted Patents = 12

% Expired Patents = 8.3

EPO Patents = 4

Trademarks = 1

Forward Citations = 82

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32 inventors (with patents filed for the assignee):

Aaron T Radomski (6 out of 46 patents)

Linnell Martinez (3 out of 33 patents)

Junhua Ding (2 out of 46 patents)

4. Jonathan W Smyka (2 out of 15 patents)

5. David Miller (2 out of 3 patents)

6. Aaron M Burry (2 out of 2 patents)

7. Michael L'Bassi (1 out of 19 patents)

8. Ross Reinhardt (1 out of 10 patents)

9. Ulrich Alfred Brammer (1 out of 17 patents)

10. Florence Defaix (1 out of 1 patent)

11. Michael Doyle (1 out of 1 patent)

12. Ross Wetmore (1 out of 1 patent)

13. Heinrich Johannes Seiwert (1 out of 2 patents)

14. Alexander Jurkov (1 out of 3 patents)

15. Jaechul Jung (1 out of 3 patents)

12 patents: Sort by Forward Citations

1. 12700573 - Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances (2026-08-04),

2. 12695058 - Plasma process control of multi-electrode systems equipped with ion energy sensors (2026-07-28),

3. 12630922 - Microwave system for microwave-assisted surface chemistry annealing of ALD processes utilizing microwave radiation energy (2026-05-19),

4. 12592361 - Hybrid high-power and broadband variable impedance modules (2026-03-31),

5. 12586759 - Pulsed RF plasma generator with high dynamic range (2026-03-24),

6. 12521745 - Method and apparatus for pulse gas delivery with pressure control (2026-01-13),

7. 12500066 - Non-invasive IED estimation for pulsed-DC and low frequency applications (2025-12-16),

8. 12480869 - Multi-wavelength ozone concentration sensor and method of use (2025-11-25),

9. 12397362 - GaN clamp with uniform pressure (2025-08-26),

10. 12393209 - Methods and apparatus for reporting inlet pressure in mass flow controllers (2025-08-19),

11. 12362146 - Adaptive pulse shaping with post match sensor (2025-07-15),

12. 7680932 - Version control system for software development (2010-03-16),

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USPTO Data Jan 1 1976 - Sep 29 2026

12 Patents

#42 in Waterloo

#1,265 in Canada

#48,090 in the World

Waterloo, Canada

Mks Inc.

Forward Citations = 82

32 inventors:

Aaron T Radomski (6 out of 46 patents)

Linnell Martinez (3 out of 33 patents)

Junhua Ding (2 out of 46 patents)

4. Jonathan W Smyka (2 out of 15 patents)

5. David Miller (2 out of 3 patents)

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