The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2026
Filed:
Nov. 15, 2024
Apparatus and tuning method for mitigating rf load impedance variations due to periodic disturbances
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Aaron M. Burry, Andover, MA (US);
Aaron T. Radomski, Andover, MA (US);
Mariusz Oldziej, Andover, MA (US);
Peter Paul, Andover, MA (US);
Ross Reinhardt, Andover, MA (US);
Assignee:
MKS Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); H01J 37/32155 (2013.01);
Abstract
A radio frequency (RF) generator includes a power source configured to generate an RF signal applied to the load and a power controller coupled to the power source. The power controller is configured to generate a control signal to vary the RF signal, wherein the control signal adjusts a frequency of the RF signal in accordance with an external RF signal applied to the load. The frequency adjustment is variable in accordance with a cost responsive to a perturbation of the frequency of the RF signal.