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Miyoko Noguchi

This inventor holds 10 USPTO granted patents. Top assignees: Canon Kabushiki Kaisha, Other. Active years: 1994-2002.

USPTO Granted Patents = 10

% Patents Active = 90.0

Average Co-Inventor Count = 1.6

ph-index = 7

Forward Citations = 203(Granted Patents)

Company Filing History:

10 out of 92,901

Canon Kabushiki Kaisha

1 out of 834,453

Other

patents

where one patent can have more than one assignee

Years Active: 1994-2002

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6473160 - Projection exposure apparatus and device manufacturing method including an aperture member having a circular light transmitting portion and a light blocking member (2002-10-29),

2. 6271909 - Exposure apparatus and device manufacturing method including changing a photo-intensity distribution of a light source and adjusting an illuminance distribution on a substrate in accordance with the change (2001-08-07),

3. 6128068 - Projection exposure apparatus including an illumination optical system (2000-10-03),

4. 6107007 - Lithography process (2000-08-22),

5. 6084655 - Imaging method for manufacture of microdevices (2000-07-04),

6. 5673102 - Image farming and microdevice manufacturing method and exposure (1997-09-30),

7. 5587834 - Semiconductor device manufacturing method and projection exposure (1996-12-24),

8. 5436692 - Projection exposure apparatus and semiconductor device manufacturing (1995-07-25),

9. 5424803 - Projection exposure apparatus and semiconductor device manufacturing (1995-06-13),

10. 5305054 - Imaging method for manufacture of microdevices (1994-04-19),

Profile summary based on public USPTO records.

Please report any incorrect information to [email protected]

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