Sagamihara, Japan

Mitsuji Marumo


Average Co-Inventor Count = 2.3

ph-index = 8

Forward Citations = 308(Granted Patents)


Location History:

  • Atsugi, JP (1993)
  • Sagamihara, JP (1992 - 1999)
  • Utsunomiya, JP (1997 - 2015)

Company Filing History:


Years Active: 1992-2015

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13 patents (USPTO):Explore Patents

Title: Mitsuji Marumo: Innovator in Wafer Processing Technology

Introduction

Mitsuji Marumo, an inventive spirit hailing from Sagamihara, Japan, has made significant contributions to the field of semiconductor manufacturing. With an impressive portfolio of 13 patents, Marumo has carved a niche for himself in the innovative landscape of wafer processing technology, primarily through his work at Canon Kabushiki Kaisha.

Latest Patents

Among his most recent accomplishments is a groundbreaking patent for a processing apparatus and device manufacturing method. This innovative apparatus is designed specifically for wafers and includes an XY stage equipped with a wafer chuck to securely hold the wafer. The elevating device rises relative to the wafer chuck to further assist in holding the wafer, while a wafer conveying robot hand takes the pivotal role of transferring the wafer from the XY stage at the designated wafer transfer position. This sophisticated design allows the XY stage to alter its direction at angles ranging between 30 degrees and 120 degrees, facilitating efficient wafer movement without interference from the robot hand at the transfer position.

Career Highlights

Mitsuji Marumo's career at Canon Kabushiki Kaisha has been marked by significant technological advancements. His innovations in wafer processing not only enhance manufacturing efficiency but also contribute to the broader semiconductor industry. His patents reflect a commitment to refining processes and improving device performance, highlighting his status as a key player in the field.

Collaborations

Marumo's work is complemented by collaborative efforts with esteemed colleagues in the industry, including Kazunori Iwamoto and Shinichi Hara. This teamwork exemplifies the synergy necessary for pushing the boundaries of innovation in technology and further developing solutions that address the complexities of semiconductor manufacturing.

Conclusion

In conclusion, Mitsuji Marumo stands out as a talented inventor whose contributions significantly impact the wafer processing domain. His dedication to innovation at Canon Kabushiki Kaisha and his impressive patent portfolio serve as a testament to his expertise and commitment to advancing technology. Marumo's inventive journey continues to inspire future advancements, ensuring a lasting legacy in the realm of semiconductor technology.

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