The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 25, 1995
Filed:
Sep. 13, 1993
Applicant:
Inventor:
Mitsuji Marumo, Sagamihara, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25B / ;
U.S. Cl.
CPC ...
355 73 ; 355 53 ; 269 21 ;
Abstract
A substrate holding apparatus includes a pump, serving as a suction source, a conveying chuck for holding a wafer substrate by suction, a connection arrangement, including parallel lines intermediate the connection arrangement, for conneting the pump to the chuck, and a valve arrangement including at least one valve provided in at least one of the parallel lines. By selecting one of the parallel lines by controlling opening/closing of these valves, the conductance of the connection line is adjusted, whereby the optimum suction pressure for the chuck is set.