The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Jul. 30, 2009
Shinichi Hirano, Utsunomiya, JP;
Mitsuji Marumo, Utsunomiya, JP;
Shinichi Hirano, Utsunomiya, JP;
Mitsuji Marumo, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A processing apparatus of the present invention processes for a wafer. The processing apparatus includes an XY stagewhich includes a wafer chuckwhich holds the waferand an elevating device which rises relative to the wafer chuckto hold the wafer, and a wafer conveying robot handwhich conveys the waferfrom the XY stageat a wafer transfer position. The XY stagemoves to change a direction at an angle between 30 degree and 120 degree via the wafer transfer positionin a state where the elevating device rises relative to the wafer chuck. The wafer conveying robot handhas a shape which does not interfere with the XY stagewhich moves to change the direction at the angle when the wafer conveying handis positioned at the wafer transfer position