Company Filing History:
Years Active: 2023
Title: Innovations of Mitsuaki Sato
Introduction
Mitsuaki Sato is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of substrate processing technology. With a total of 2 patents to his name, Sato's work has had a considerable impact on the industry.
Latest Patents
Sato's latest patents include a substrate processing apparatus and a placing table with a positioning method of an edge ring. The substrate processing apparatus features a chamber with a substrate support and a connection that facilitates fluid communication between flow paths. This innovative design enhances the efficiency of substrate processing. The placing table includes an edge ring surrounding a substrate, an electrostatic chuck, and an elastic member, all working together to improve the positioning and processing of substrates.
Career Highlights
Mitsuaki Sato is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop and refine his innovative ideas, contributing to advancements in substrate processing technologies.
Collaborations
Sato has collaborated with notable coworkers such as Yasuharu Sasaki and Toshiya Tsukahara. Their combined expertise has fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Mitsuaki Sato's contributions to substrate processing technology through his patents and collaborations highlight his role as a significant inventor in the field. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.