Location History:
- Kawasaki, JP (1981)
- Kanagawa, JP (1988 - 2000)
Company Filing History:
9 out of 1,233 
1 out of 4,979 
1 out of 23 Years Active: 1981-2000
Title: The Innovations of Mitsuaki Minato
Introduction
Mitsuaki Minato is a prominent inventor based in Kanagawa, Japan. He holds a total of 10 patents, showcasing his significant contributions to the field of plasma processing technology. His work has had a profound impact on the manufacturing processes of silicon wafers, which are essential in the electronics industry.
Latest Patents
Among his latest patents is the "Coaxial Plasma Processing Apparatus." This invention features a tubular reaction chamber mounted on an annular insulating plate, which is placed on a grounded metallic base plate. A cylindrical outer electrode, connected to a high-frequency power supply, surrounds the reaction chamber, while a cylindrical inner electrode is positioned coaxially within it. The inner electrode includes multiple inlet holes and is fixed to the metallic base plate. Additionally, a holder within the inner electrode supports several wafers at spaced intervals.
Another notable patent is the "Plasma Processing Apparatus," designed for etching, ashing, or processing silicon wafers. This apparatus consists of two spaced reaction chambers for processing silicon wafers in plasma, along with two cassette table mechanisms that support wafer cassettes. A transfer robot is strategically placed between the reaction chambers and cassette table mechanisms to facilitate the transfer of wafers. Each cassette table mechanism features a turntable that allows for the proper orientation of the wafer cassette, ensuring it does not interfere with the robot arm.
Career Highlights
Mitsuaki Minato has worked with several notable companies throughout his career, including Tokyo Ohka Kogyo Co., Ltd. and Oki Electric Industry Co., Ltd. His experience in these organizations has contributed to his expertise in plasma processing technologies and innovations.
Collaborations
Throughout his career, Minato has collaborated with esteemed colleagues such as Akira Uehara and Isamu Hijikata. These partnerships have further enriched his work and led to advancements in the field.
Conclusion
Mitsuaki Minato's contributions to plasma processing technology through his patents and collaborations have significantly influenced the electronics industry. His innovative spirit continues to drive advancements in manufacturing processes, making him a noteworthy figure in the realm of invention.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.