Location History:
- San Jose, CA (US) (2017)
- Oakley, CA (US) (2020 - 2022)
Company Filing History:
Years Active: 2017-2022
Title: Miroslav Gelo: Innovator in Semiconductor Processing Technologies
Introduction
Miroslav Gelo is a notable inventor based in Oakley, CA, who has made significant contributions to the field of semiconductor processing. With a total of 3 patents to his name, Gelo's work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of Gelo's latest patents is the "Pedestal lift for semiconductor processing chambers." This invention provides a pedestal lift assembly for a plasma processing chamber, featuring a platen that couples with a shaft of a pedestal. The assembly includes an absolute linear encoder that detects incremental movement of the platen, allowing for precise vertical adjustments. Additionally, the lift rod attached to the platen is operated by a motor rotor encoder brake module, enabling controlled movement in both upward and downward directions.
Another significant patent is the "Physical vapor deposition in-chamber electro-magnet." This innovation enhances the film deposition process within a PVD chamber, ensuring high thickness uniformity. The design incorporates a coil of an electromagnetic that modifies plasma in the edge portion of the processing region when energized with direct current power. This coil is strategically placed within the vacuum portion of the PVD chamber, optimizing the processing environment.
Career Highlights
Miroslav Gelo is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has allowed him to develop cutting-edge technologies that contribute to advancements in semiconductor manufacturing.
Collaborations
Gelo has collaborated with several talented individuals in his field, including Brian T West and Youssef A Loldj. These collaborations have fostered innovation and have been instrumental in the development of new technologies.
Conclusion
Miroslav Gelo's contributions to semiconductor processing technologies through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor in the industry. His innovative solutions continue to shape the future of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.