The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 15, 2022
Filed:
Apr. 26, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Brian T. West, San Jose, CA (US);
Miroslav Gelo, Oakley, CA (US);
Yan Rozenzon, San Carlos, CA (US);
Roger M. Johnson, Livermore, CA (US);
Mark Covington, Santa Clara, CA (US);
Soundarrajan Jembulingam, Bangalore, IN;
Simon Nicholas Binns, East Palo Alto, CA (US);
Vivek Vinit, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Implementations described herein provide a pedestal lift assembly for a plasma processing chamber and a method for using the same. The pedestal lift assembly has a platen configured to couple a shaft of a pedestal disposed in the plasma processing chamber. An absolute linear encoder is coupled to a fixed frame wherein the absolute linear encoder is configured to detect incremental movement of the platen. A lift rod is attached to the platen. A motor rotor encoder brake module (MRBEM) is coupled to the fixed frame and moveably coupled to the lift rod, the motor encoder brake module configured to move the lift rod in a first direction and a second direction, wherein the movement of the lift rod results in the platen traveling vertically relative to the fixed frame.