Location History:
- Ozumachi, JP (2000 - 2002)
- Fishkill, NY (US) (2010)
- Koshi, JP (2015 - 2021)
- Kumamoto, JP (2004 - 2022)
Company Filing History:
Years Active: 2000-2022
Title: Minoru Kubota: Innovator in Substrate Processing Technology
Introduction
Minoru Kubota is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 14 patents. His work focuses on enhancing the precision and efficiency of wafer processing methods, which are crucial in the semiconductor industry.
Latest Patents
Among his latest patents, Kubota has developed a substrate processing apparatus and method, along with a computer-readable recording medium. This innovation allows for the determination of the end of polishing for each wafer with high accuracy. The wafer processing method he devised includes several processes: acquiring the initial state of the processing target surface, forming a coating film, polishing the surface, acquiring the processed state, and determining the end of polishing or any insufficiencies based on the initial and processed states. Additionally, he has created a developing method that involves forming a liquid pool of a diluted developing solution and ensuring an effective application of the developing solution onto the substrate.
Career Highlights
Minoru Kubota is currently associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment sector. His work at the company has been instrumental in advancing substrate processing technologies, which are vital for the production of high-performance semiconductor devices.
Collaborations
Kubota has collaborated with notable colleagues, including Kenichi Miyamoto and Hideya Tanaka. Their combined expertise has contributed to the development of innovative solutions in the field of substrate processing.
Conclusion
Minoru Kubota's contributions to substrate processing technology have established him as a key figure in the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in wafer processing methods.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.