Company Filing History:
Years Active: 2021-2025
Title: Innovations of Inventor Mingyang Ma
Introduction
Mingyang Ma is a notable inventor based in Phoenix, AZ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on developing advanced materials and systems that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Mingyang Ma's latest patents include innovative solutions such as high temperature coatings for a preclean and etch apparatus. This patent proposes a coating and a method to form the coating for semiconductor film pre-clean and etch apparatus. The coating is designed for environments where traditional coatings are ineffective. It offers advantages such as the ability to deliver hydrogen and fluorine radicals to a wafer surface, coverage of high aspect ratio features, operability in temperatures exceeding 150° C, and protection of critical components. Another significant patent is a reactor system that includes a gas distribution assembly for use with activated species. This system features a gas distribution device, a gas expansion area, and a showerhead plate, enhancing the efficiency of gas distribution in semiconductor processing.
Career Highlights
Mingyang Ma is currently employed at ASML Holding B.V., a leading company in the semiconductor industry. His work at ASML has allowed him to contribute to cutting-edge technologies that are essential for modern electronics. His expertise in high temperature coatings and reactor systems has positioned him as a valuable asset in the field.
Collaborations
Mingyang has collaborated with talented individuals such as Alexandros Demos and Xing Lin. These collaborations have fostered innovation and have led to the development of advanced technologies in semiconductor manufacturing.
Conclusion
Mingyang Ma's contributions to the semiconductor industry through his patents and collaborations highlight his role as an influential inventor. His innovative solutions continue to shape the future of semiconductor technology.