The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Oct. 01, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Xing Lin, Chandler, AZ (US);
Peipei Gao, Tempe, AZ (US);
Prajwal Nagaraj, Tempe, AZ (US);
Mingyang Ma, Phoenix, AZ (US);
Wentao Wang, Phoenix, AZ (US);
Ion Hong Chao, Gilbert, AZ (US);
Alexandros Demos, Scottsdale, AZ (US);
Paul Ma, Scottsdale, AZ (US);
Hichem M'Saad, Paradise Valley, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45582 (2013.01); C23C 16/403 (2013.01); C23C 16/405 (2013.01); C23C 16/45536 (2013.01); C23C 16/45565 (2013.01); C23C 16/50 (2013.01); H01J 37/32357 (2013.01); H01J 37/3244 (2013.01);
Abstract
A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and a showerhead plate downstream of the gas distribution device and the expansion area.