Minghao Li

Title: Innovations of Inventor Minghao Li

Introduction

Minghao Li is a notable inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor technology, particularly in the area of silicon wafer conductivity. With a total of three patents to his name, his work has garnered attention for its practical applications and innovative methodologies.

Latest Patents

Minghao Li's latest patents include a method for verification of conductivity type of silicon wafer. This method involves measuring the resistivity of the silicon wafer to obtain a first resistivity, placing the silicon wafer under an atmosphere of air for a predicted time period, and measuring the resistivity again to obtain a second resistivity. By comparing these two resistivity measurements, the conductivity type of the silicon wafer can be accurately determined. This method is particularly useful for silicon wafers with high resistivity, such as those exceeding 500 ohms. The advantages of this method include accurate test results, ease of operation, simple device requirements, and reduced costs.

Another significant patent by Minghao Li is a measuring method of resistivity of a wafer. This invention outlines a process that includes choosing a wafer to be measured, conducting thermal treatment to remove thermal donors, performing an oxidation process to form an oxidized surface, and finally measuring the resistivity of the wafer. The oxidation step is crucial as it minimizes surface variation during subsequent processes, leading to more consistent resistivity measurements.

Career Highlights

Throughout his career, Minghao Li has worked with prominent organizations such as Zing Semiconductor Corporation and the Chinese Academy of Sciences. His experience in these institutions has allowed him to refine his skills and contribute to advancements in semiconductor technology.

Collaborations

Minghao Li has collaborated with notable colleagues, including Xing Wei and Zhongying Xue. Their combined expertise has fostered an environment of innovation and research excellence.

Conclusion

Minghao Li's contributions to the field of semiconductor technology through his patents and collaborations highlight his role as a significant inventor. His innovative methods for measuring and verifying silicon wafer conductivity are paving the way for advancements in the industry.