The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2025

Filed:

Dec. 04, 2023
Applicant:

Zing Semiconductor Corporation, Shanghai, CN;

Inventors:

Xing Wei, Shanghai, CN;

Hao Wang, Shanghai, CN;

Minghao Li, Shanghai, CN;

Yuehui Yu, Shanghai, CN;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01N 21/49 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9505 (2013.01); G01N 21/49 (2013.01);
Abstract

The present invention provides a method for determining the type of defects in a monocrystalline silicon wafer, which includes the steps of: using LST to measure particles in an as-grown silicon wafer and thereby obtaining a first measurement, and determining a V-rich region based on the first measurement and a first preset density value; and subjecting the silicon wafer to a thermal treatment, again using LST to measure particles in the silicon wafer and thereby obtaining a second measurement, and determining a Pv region, an I-rich region and a Pi region based on the second measurement, a second preset density value and a third preset density value. As a result, a particle density can be utilized as a basis for accurately and efficiently determining a region of interest of a monocrystalline silicon wafer as one of a V-rich region, a Pv region, a Pi region and an I-rich region.


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