Company Filing History:
Years Active: 2024
Title: Innovations by Inventor Ming Lei
Introduction
Ming Lei is a notable inventor based in Irvine, California. He has made significant contributions to the field of semiconductor technology. With a total of two patents to his name, his work focuses on advanced methods for analyzing semiconductor devices.
Latest Patents
Ming Lei's latest patents include systems and methods for determining characteristics of semiconductor devices through Second Harmonic Generation (SHG). This innovative approach can interrogate surfaces, such as those of layered semiconductor structures on a semiconductor wafer. The SHG technique evaluates interfacial regions, particularly between metal and oxide layers. Various parameters, including input polarization, output polarization, and the azimuthal angle of the incident beam, can influence the SHG signal. By varying these parameters, different types of patterns on the wafer can be analyzed. Additionally, SHG metrology on various test structures aids in characterizing samples effectively. Another patent focuses on SHG optical inspection system designs, which can interrogate surfaces of samples like layered semiconductor structures. These systems can simultaneously collect different polarization components of the SHG signal, providing diverse information. SHG imaging systems can generate images or maps of the SHG signal distribution over larger sample areas, employing multiple beams and detectors for comprehensive analysis.
Career Highlights
Ming Lei is currently associated with Femtometrix, Inc., where he continues to innovate in the semiconductor field. His work has been instrumental in advancing SHG techniques, which are crucial for the development of next-generation semiconductor devices.
Collaborations
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Conclusion
Ming Lei's contributions to semiconductor technology through his innovative patents highlight his expertise and dedication to advancing the field. His work continues to influence the development of new technologies in the semiconductor industry.