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Ming-Hwa Yoo

USPTO Granted Patents = 6

Average Co-Inventor Count = 4.4

ph-index = 4

Forward Citations = 35(Granted Patents)

Location History:

I-Lan, TW (2002 - 2004)
Hsiu-Chu, TW (2004)
Yung hu, TW (2004)
Shin-Chu, TW (2004)

Company Filing History:

6 out of 40,635

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 2002-2004

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6 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6815072 - Method to solve particle performance of FSG layer by using UFU season film for FSG process (2004-11-09),

2. 6815007 - Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film (2004-11-09),

3. 6759347 - Method of forming in-situ SRO HDP-CVD barrier film (2004-07-06),

4. 6703317 - Method to neutralize charge imbalance following a wafer cleaning process (2004-03-09),

5. 6602560 - Method for removing residual fluorine in HDP-CVD chamber (2003-08-05),

6. 6479098 - Method to solve particle performance of FSG layer by using UFU season film for FSG process (2002-11-12),

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