Ming-Huei Tseng

Title: Innovations by Inventor Ming-Huei Tseng

Introduction

Ming-Huei Tseng is a notable inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. With a total of 2 patents, Tseng's work focuses on enhancing the performance and accuracy of photolithographic processes.

Latest Patents

One of Tseng's latest patents is titled "Frame layout to monitor overlay performance of chip composed of multi-exposure images." This invention provides a method for determining the overlay accuracy of a first chip image relative to a second chip image. The method employs a vernier scale in two orthogonal directions included in the scribeline of both chip images. Another embodiment utilizes a box-in-box pattern within the scribeline. This innovation allows for the direct determination of overlay accuracy from monitor images in the photoresist after exposure and development.

Another significant patent by Tseng is the "Mark focusing system for steppers." This invention addresses the challenges faced by single spot laser focusing systems used in photolithographic stepping systems. By ensuring that the focusing spot falls within an alignment mark field, rather than the integrated circuit field, the invention improves the accuracy and effectiveness of the photolithographic process.

Career Highlights

Ming-Huei Tseng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to develop and refine his innovative ideas, contributing to advancements in chip manufacturing technology.

Collaborations

Throughout his career, Tseng has collaborated with talented individuals such as Li-Kong Turn and Chia-Hsiang Chen. These collaborations have fostered a creative environment that has led to the development of groundbreaking technologies in the semiconductor field.

Conclusion

Ming-Huei Tseng's contributions to semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry and pave the way for future innovations.