Company Filing History:
Years Active: 2016-2017
Title: Mikio Segawa: Innovator in Wafer Transport Technology
Introduction
Mikio Segawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of wafer transport technology, holding a total of 2 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Mikio Segawa's latest patents include an advanced EFEM (Equipment Front End Module) that features a housing designed to create a wafer transport chamber. This chamber is substantially closed by connecting load ports to an opening on a wall, along with a processing apparatus. The EFEM incorporates a wafer transport apparatus that facilitates the movement of wafers between the processing apparatus and FOUPs (Front Opening Unified Pods) mounted on the load ports. Additionally, it includes a gas delivery port, a gas suction port, a gas feedback path, and a FFU (Fan Filter Unit) that contains a filter to eliminate particles from the delivered gas. The design allows for the circulation of gas within the wafer transport chamber by generating a downward gas flow and feeding back the gas through the gas feedback path.
Another notable invention is the atmosphere replacement apparatus, which is capable of replacing the atmosphere on the surface of a wafer with a minimal amount of gas. This apparatus is designed with a cover that can face and cover the wafer during transport. It also features a gas supply mechanism that introduces gas with properties different from the surrounding atmosphere, effectively replacing the atmosphere on the wafer's surface.
Career Highlights
Mikio Segawa is currently employed at Sinfonia Technology Co., Ltd., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the capabilities of wafer transport systems, contributing to more efficient manufacturing processes.
Collaborations
Throughout his career, Mikio has collaborated with notable colleagues, including Yasushi Taniyama and Mitsuo Natsume. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Mikio Segawa's contributions to wafer transport technology through his patents and collaborations highlight his role as a key innovator in the semiconductor industry. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.