The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2017
Filed:
Dec. 12, 2014
Sinfonia Technology Co., Ltd., Tokyo, JP;
Mikio Segawa, Tokyo, JP;
Yasushi Taniyama, Tokyo, JP;
Mitsuo Natsume, Tokyo, JP;
Atsushi Suzuki, Tokyo, JP;
Toshihiro Kawai, Tokyo, JP;
Kunihiko Sato, Tokyo, JP;
SINFONIA TECHNOLOGY CO., LTD., Tokyo, JP;
Abstract
An EFEM includes a housingthat constitutes a wafer transport chamberthat is substantially closed by connecting load portsto an openingprovided on a wall, and connecting a processing apparatus; a wafer transport apparatus, and transports a wafer between the processing apparatusand the FOUPsmounted on the load ports; a gas delivery port; a gas suction port; a gas feedback path; and a FFUthat includes a filterthat is provided in the gas delivery port, and eliminates particles contained in the delivered gas, wherein the gas in the wafer transport chamberis circulated by generating a downward gasflow in the wafer transport chamberand feeding back the gas through the gas feedback path