Michael vanAbbema

Title: Michael vanAbbema: Innovator in Millisecond Anneal Systems

Introduction

Michael vanAbbema is a notable inventor based in Ulm, Germany. He has made significant contributions to the field of semiconductor processing, particularly in the development of preheat processes for millisecond anneal systems. With a total of two patents to his name, vanAbbema's work is recognized for its innovative approach to enhancing the efficiency of semiconductor manufacturing.

Latest Patents

One of Michael vanAbbema's latest patents focuses on preheat processes for millisecond anneal systems. This patent outlines a method that includes receiving a substrate on a wafer support plate within a processing chamber. It involves obtaining temperature measurements of the wafer support plate using a temperature sensor and applying a preheat recipe based on these measurements. Another implementation of this patent describes obtaining temperature measurements from a sensor with a field of view of the wafer support plate and applying a pulsed preheat recipe to optimize the heating process.

Career Highlights

Throughout his career, Michael vanAbbema has worked with several prominent companies in the semiconductor industry. Notably, he has been associated with Mattson Technology, Inc. and Beijing E-town Semiconductor Technology Co., Ltd. His experience in these organizations has contributed to his expertise in semiconductor processing technologies.

Collaborations

Michael vanAbbema has collaborated with several professionals in his field, including Markus Lieberer and Christian Pfah