Michael St Peter

Title: Michael St Peter: Innovator in Ion Source Technology

Introduction

Michael St Peter is a notable inventor based in Gloucester, MA (US). He has made significant contributions to the field of ion source technology, holding a total of 5 patents. His work focuses on optimizing beam current from ion sources, which is crucial for various applications in semiconductor manufacturing and materials science.

Latest Patents

One of his latest patents is titled "System and method for improved beam current from an ion source." This invention discloses an IHC ion source that employs a negatively biased cathode along with one or more side electrodes. In certain embodiments, the side electrodes are left electrically unconnected, while in others, they are grounded. This innovative design allows for the optimization of beam current for different species, such as arsenic and boron, by adjusting the configuration of the side electrodes. A relay is utilized to switch between these modes, and a controller communicates with the relay to manage the desired feed gas.

Another patent under his name also focuses on improving beam current from an ion source. In this case, the side electrodes are biased using an electrode power supply that supplies a voltage between 0 and -50 volts relative to the chamber. By fine-tuning the output from the electrode power supply, beam current can be optimized for various species, enhancing the efficiency of the ion source.

Career Highlights

Throughout his career, Michael St Peter has worked with prominent companies in the semiconductor industry, including Applied Materials, Inc. and Varian Semiconductor Equipment Associates, Inc. His experience in these organizations has allowed him to develop and refine his innovative ideas in ion source technology.

Collaborations

Michael has collaborated with notable professionals in his field, including Shengwu Chang and Frank Sinclair. These partnerships have contributed to the advancement of his research and the successful development of his patents.

Conclusion

Michael St Peter is a distinguished inventor whose work in ion source technology has led to significant advancements in the field. His innovative patents and collaborations with industry professionals highlight his commitment to improving beam current optimization. His contributions continue to impact the semiconductor industry positively.