Location History:
- Eltweg, AT (2013)
- Eitweg, AT (2014 - 2015)
- Sankt Stefan, AT (2015)
- Villach, AU (2020)
Company Filing History:
Years Active: 2013-2020
Title: The Innovative Contributions of Michael Puggl
Introduction
Michael Puggl, an accomplished inventor based in Eitweg, Austria, has made significant strides in the field of substrate processing technology. With a total of six patents to his name, Puggl continues to push the boundaries of innovation in semiconductor manufacturing.
Latest Patents
Among his notable contributions, Puggl's latest patents include:
1. **Spin Chuck with Concentrated Center and Radial Heating** - This innovative substrate processing system features a spin chuck that holds and rotates a substrate. It incorporates a heating assembly designed to heat the opposite surface of the substrate, consisting of a main heater assembly with a series of light-emitting diodes (LEDs) and a nozzle stack cap. The design ensures effective heating while dispensing liquids onto the substrate's surface.
2. **Device for Holding Wafer Shaped Articles** - Puggl engineered a spin chuck specifically to hold semiconductor wafers. This device is equipped with damping mechanisms that minimize the impact force on the wafer edges during shifts, utilizing either linear or rotary dashpots for enhanced precision and control.
Career Highlights
Michael Puggl is currently employed at Lam Research AG, a prominent name in the semiconductor equipment industry. His dedication to innovation and quality has solidified his reputation as a leading inventor in substrate processing technologies.
Collaborations
Throughout his career, Puggl has had the opportunity to collaborate with talented individuals such as Dieter Frank and Alexander Schwartzfurtner. These collaborations have not only facilitated knowledge sharing but have also driven forward the advancement of technologies in their shared field.
Conclusion
In summary, Michael Puggl's contributions to innovation in the semiconductor industry are noteworthy. His impactful patents and collaborative spirit continue to inspire advancements that will shape the future of substrate processing technologies. As he progresses in his career, the inventions of Michael Puggl are sure to leave a lasting legacy.