Phoenix, AZ, United States of America

Michael James Lombardi



Average Co-Inventor Count = 5.7

ph-index = 5

Forward Citations = 97(Granted Patents)


Company Filing History:


Years Active: 2003-2006

Loading Chart...
Loading Chart...
5 patents (USPTO):Explore Patents

Title: Michael James Lombardi: Innovator in Semiconductor Technology

Introduction

Michael James Lombardi is a prominent inventor based in Phoenix, AZ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on improving processes and apparatuses used in the manipulation and processing of semiconductor wafers.

Latest Patents

Lombardi's latest patents include innovative designs such as the vacuum-processing chamber-shield and multi-chamber pumping method. This invention provides a high gas flow conductance path to an exhaust volume of a multi-chamber vacuum processing apparatus, allowing for the operation of chambers at different pressures without cross-contamination. Another notable patent involves apparatus and methods for manipulating semiconductor wafers. This invention features a wafer handling system that utilizes a vacuum chuck with flow diverters to optimize the vacuum pressure applied to unblocked vacuum ports, enhancing the attractive force on thin semiconductor wafers that may exhibit warpage.

Career Highlights

Michael James Lombardi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in advancing technologies that improve the efficiency and effectiveness of semiconductor processing.

Collaborations

Lombardi has collaborated with notable colleagues such as Stephen D Coomer and Glyn J Reynolds, contributing to the development of innovative solutions in the semiconductor field.

Conclusion

Michael James Lombardi's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as a key innovator in the industry. His work continues to influence advancements in wafer processing and handling techniques.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…