Wetzlar, Germany

Michael Halama



Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2008

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1 patent (USPTO):Explore Patents

Title: Michael Halama - Innovator in Semiconductor Technology

Introduction

Michael Halama is a notable inventor based in Wetzlar, Germany. He has made significant contributions to the field of semiconductor technology, particularly in the area of wafer inspection devices. His innovative approach has led to the development of a unique device that enhances the efficiency of detecting defects on wafer surfaces.

Latest Patents

Michael Halama holds a patent for a wafer inspection device. This device is designed for detecting defects on semiconductor substrates or wafers. It features an air-cushion stage that can be displaced in two perpendicular directions (X, Y). The device is equipped with several air nozzles and at least one valve connected to an electric control unit. This configuration ensures that a normal pressure prevails in the air nozzles when the electric control unit delivers the corresponding signal. His patent represents a significant advancement in the field of semiconductor inspection.

Career Highlights

Michael Halama is currently employed at Vistec Semiconductor Systems GmbH, where he continues to innovate and contribute to the semiconductor industry. His work has been instrumental in improving the quality and reliability of semiconductor manufacturing processes.

Collaborations

Some of his coworkers include Albert Kreh and Guenter Schmidt, who collaborate with him on various projects within the company. Their combined expertise enhances the innovative capabilities of Vistec Semiconductor Systems GmbH.

Conclusion

Michael Halama's contributions to semiconductor technology, particularly through his patented wafer inspection device, highlight his role as a key innovator in the field. His work continues to influence the industry and improve manufacturing processes.

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