The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2008
Filed:
May. 12, 2004
Applicants:
Michael Halama, Wetzlar, DE;
Albert Kreh, Solms, DE;
Guenter Schmidt, Leun, DE;
Inventors:
Assignee:
Vistec Semiconductor Systems GmbH, Wetzlar, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21C 17/00 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor substrate or wafer inspection device for detecting defects on wafer surfaces includes an air-cushion stage which can be displaced in two directions (X,Y) that are perpendicular to one another. Several air nozzles are provided for this purpose. At least one valve is connected to at least one electric control unit, the valve being configured in such a way that a normal pressure prevails in the air nozzles when the electric control unit delivers a corresponding signal.