Norwood Young America, MN, United States of America

Michael Gruenhagen

USPTO Granted Patents = 3 

Average Co-Inventor Count = 2.6

ph-index = 1

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 2017-2025

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3 patents (USPTO):Explore Patents

Title: Innovations by Inventor Michael Gruenhagen

Introduction

Michael Gruenhagen is a notable inventor based in Norwood Young America, Minnesota. He has made significant contributions to technology with three patents to his name. His work primarily focuses on advancements in substrate processing for applications in semiconductor fabrication and microelectronics.

Latest Patents

One of his latest inventions is the "Substrate Scanning Apparatus with Pendulum and Rotatable Substrate Holder." This innovative method involves immobilizing a substrate within a processing chamber and performing a scan by moving the substrate relative to a focused processing apparatus. The design employs a pendulum arm, which allows for precise movements during the scanning process.

Another noteworthy patent is the "Translating and Rotating Chuck for Processing Microelectronic Substrates in a Process Chamber." This invention introduces cleaning systems and methods that utilize a rotatable and translatable chuck assembly. This system incorporates a compact drive unit that significantly reduces friction-induced contamination, thereby enhancing the cleaning process, especially in cryogenic treatments.

Career Highlights

Michael has had a distinguished career, working with prominent companies such as Tel Manufacturing and Engineering of America, Inc. and Tel FSI, Inc. His experience in these organizations has played a crucial role in developing his patented technologies.

Collaborations

Throughout his career, Michael has worked alongside accomplished colleagues, including Alan Dee Rose and Edward Hanzlik. These collaborations have fostered an environment of shared innovation and have contributed to the successful development of cutting-edge technologies in the semiconductor industry.

Conclusion

Michael Gruenhagen's contributions to innovation reflect his dedication to advancing technology within the field of microelectronics. His patents not only demonstrate his inventive prowess but also enhance the efficiency and effectiveness of semiconductor processing techniques. As he continues to innovate, his work remains influential in the ongoing evolution of the industry.

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