Company Filing History:
3 out of 10,307 
1 out of 1,231 
Years Active: 2001-2005
Title: Michael G Ward: Innovator in Semiconductor Technology
Introduction
Michael G Ward is a prominent inventor based in Phoenix, AZ, known for his contributions to semiconductor technology. He holds a total of 4 patents that reflect his innovative approach to solving complex engineering challenges in the field.
Latest Patents
One of his latest patents focuses on heterojunction field effect transistors using silicon-germanium and silicon-carbon alloys. This invention provides a method for reducing threading defect density by minimizing germanium content in a SiGe relaxed buffer layer, which supports a strained silicon channel layer. The channel layer is formed from a silicon-carbon alloy, containing less than about 1.5 atomic % carbon, which enhances the performance of semiconductor devices.
Another significant patent involves a method for passivating and stabilizing a Ti-PECVD process chamber. This methodology allows for efficient conditioning of the processing chamber after cleaning, thereby improving the productivity of the system. The technique ensures that the film properties, such as resistivity and uniformity, are maintained during continuous operation, allowing for the processing of thousands of wafers without frequent interruptions.
Career Highlights
Michael has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited and International Rectifier Corporation. His experience in these organizations has contributed to his expertise in developing advanced semiconductor technologies.
Collaborations
Throughout his career, Michael has collaborated with esteemed colleagues such as Joseph T Hillman and Gerrit J Leusink. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Michael G Ward's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.