Michael E Haslam

Title: Michael E Haslam: Innovator in Integrated Circuit Technology

Introduction

Michael E Haslam is a notable inventor based in Highland Village, TX (US). He holds a total of 4 patents that contribute significantly to the field of integrated circuit technology. His innovative methods have paved the way for advancements in photolithography and contact structures in integrated circuits.

Latest Patents

One of Haslam's latest patents is a method for reducing the reflectivity of a metal layer. This method involves depositing a thin buffer layer, such as oxide, over the metal layer and performing a short plasma etch to roughen the oxide layer. This roughened layer significantly reduces the reflectivity of the underlying metal layer. Alternatively, the plasma etch can be applied directly to the metal layer, resulting in a significant roughening of its upper surface, which also reduces reflectivity.

Another significant patent by Haslam is a method for forming contact structures in integrated circuits. This involves forming a buffer layer over an underlying conductive element, followed by the deposition of a first conductive layer that is patterned to define a first interconnect layer. The buffer layer protects the underlying conductive element from damage during this process. Portions of the buffer layer that are not covered by the first interconnect layer are then removed, allowing for the deposition of a second conductive layer. This second layer is anisotropically etched to form conductive sidewall spacers that make electrical contact with the underlying conductive element.

Career Highlights

Throughout his career, Michael E Haslam has worked with prominent companies in the semiconductor industry, including SGS-Thomson Microelectronics Limited and STMicroelectronics GmbH. His contributions to these organizations have been instrumental in advancing integrated circuit technologies.

Collaborations

Haslam has collaborated with notable professionals in the field, including Charles R Spinner, III and Gregory J Stagaman. These collaborations have further enriched his work and contributed to the development of innovative technologies.

Conclusion

Michael E Haslam is a distinguished inventor whose work in integrated circuit technology has led to significant advancements. His innovative patents and collaborations with industry professionals highlight his contributions to the field. His ongoing influence continues to shape the future of semiconductor technology.