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Santa Clara, CA, United States of America

Michael D Kilgore

USPTO Granted Patents = 3

Average Co-Inventor Count = 2.2

ph-index = 2

Forward Citations = 150(Granted Patents)

Location History:

Santa Clara, CA (US) (2001 - 2006)
Sunnyvale, CA (US) (2009)

Company Filing History:

Novellus Systems Incorporated

Years Active: 2001-2009

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3 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7558045 - Electrostatic chuck assembly with capacitive sense feature, and related operating method (2009-07-07),

2. 7144822 - High density plasma process for optimum film quality and electrical results (2006-12-05),

3. 6200412 - Chemical vapor deposition system including dedicated cleaning gas injection (2001-03-13),

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