The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2009
Filed:
Mar. 20, 2008
Jaime Onate, Fremont, CA (US);
Michael Kilgore, Sunnyvale, CA (US);
Jimmy Lam, Fremont, CA (US);
Timothy W. Kueper, Santa Clara, CA (US);
Dan YE, Sunnyvale, CA (US);
Jaime Onate, Fremont, CA (US);
Michael Kilgore, Sunnyvale, CA (US);
Jimmy Lam, Fremont, CA (US);
Timothy W. Kueper, Santa Clara, CA (US);
Dan Ye, Sunnyvale, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
A semiconductor workpiece processing system for treating a workpiece, such as a semiconductor wafer, is provided. A related operating control method is also provided. The system includes an electrostatic chuck configured to receive a workpiece, and a clamping voltage power supply coupled to the electrostatic chuck. The electrostatic chuck has a clamping electrode assembly, and the clamping voltage power supply is coupled to the clamping electrode assembly. The clamping voltage power supply includes a direct current (DC) voltage generator configured to generate a DC clamping voltage for the clamping electrode assembly, an alternating current (AC) voltage generator configured to generate an AC excitation signal for the clamping electrode assembly, and a processing architecture coupled to the clamping electrode assembly. The processing architecture is configured to analyze attributes of a workpiece presence signal obtained in response to the AC excitation signal, and, based on the attributes, verify proper/improper positioning of the workpiece relative to the electrostatic chuck.