This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Novellus Systems Incorporated. Active years: 2009.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2009
Title: Dan Ye and His Semiconductor Processing Patent.
Introduction
Dan Ye is an inventor based in Sunnyvale, California, whose patent work addresses semiconductor wafer processing. His disclosed invention focuses on detecting whether a workpiece is properly positioned on an electrostatic chuck.
Latest Patents
The provided information identifies one patent associated with Dan Ye: Electrostatic Chuck Assembly with Capacitive Sense Feature, and Related Operating Method. The invention describes a semiconductor workpiece processing system with an electrostatic chuck and a clamping voltage power supply. The supply generates both a direct-current clamping voltage and an alternating-current excitation signal. A processing architecture analyzes the resulting workpiece-presence signal to verify whether the workpiece is properly positioned relative to the chuck. The patent record lists 1 patent.
Career Highlights
Ye is associated with Novellus Systems Incorporated. His patent reflects work on electrostatic chuck control and capacitive sensing for semiconductor manufacturing equipment.
Collaborations
Jaime Onate and Michael D. Kilgore are identified as Ye’s coworkers. The available information does not specify their roles in the patent or the extent of their collaboration.
Conclusion
Dan Ye’s disclosed patent centers on using capacitive sensing to check workpiece positioning, supporting reliable operation in semiconductor processing systems.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile