Michael A Anderson

Title: **Michael A. Anderson: Innovator in Wafer Cleaning Technology**

Introduction

Michael A. Anderson, based in Santa Clara, CA, is an influential inventor with a significant contribution to the field of semiconductor manufacturing. He holds three patents and has developed advanced technologies that enhance the cleaning process of wafers, a crucial step in semiconductor production.

Latest Patents

One of his notable inventions is the **Non-contact Clean Module**. This innovative cleaning module is designed for cleaning wafers and features a wafer gripping device that supports the wafer in a vertical orientation. The device includes a catch cup and a gripper assembly. The catch cup comprises a wall that has an annular inner surface defining a processing region, with an angled portion that is symmetric about the central axis of the gripping device. The gripper assembly consists of a first plate assembly, a second plate assembly, several gripping pins, and loading pins. The gripping pins serve to secure the wafer during the cleaning process, while the loading pins facilitate the loading and unloading of the wafer. Additionally, the cleaning module is equipped with a sweep arm connected to a nozzle mechanism that delivers liquids to both the front and back sides of the wafer.

Career Highlights

Throughout his career, Michael has worked with renowned companies such as Applied Materials, Inc. and Intel Corporation, where he has utilized his expertise in innovative cleaning technologies to improve wafer processing efficiency. His work has made a substantial impact on the semiconductor industry, pushing the boundaries of existing cleaning technologies.

Collaborations

Michael has collaborated with several talented individuals, including coworkers like Jagan Rangarajan and Adrian Blank. These partnerships have contributed to the development and refinement of his innovative patents.

Conclusion

Michael A. Anderson is a pivotal figure in the realm of wafer cleaning technology. His latest patents reflect his dedication to advancing semiconductor manufacturing processes, demonstrating his commitment to innovation and the importance of efficient cleaning systems in maintaining wafer quality. As he continues to contribute to this field, his work will undoubtedly lead to further advancements in the technology landscape.