Applied Materials, Inc.

Intel Corporation

Michael A Anderson

Steven M Zuniga

Jagan Rangarajan

Ekaterina A Mikhaylichenko

Edward Golubovsky

Jonathan Paul Domin

Balasubramaniam Coimbatore Jaganathan

Adrian Blank

Nadathur Rajagopalan Satish

Deborah T Marr

Jong Soo Park

Sheng C Li

Mikhail Smelyanskiy

Asit K Mishra

Mostofa Ali Patwary

Narayanan Sundaram

A cleaning module for cleaning a wafer comprises a wafer gripping device configured to support a wafer in a vertical orientation and comprises a catch cup and a gripper assembly. The catch cup comprises a wall that has an annular inner surface that defines a processing region and has an angled portion that is symmetric about a central axis of the wafer gripping device. The gripper assembly comprises a first plate assembly, a second plate assembly, a plurality of gripping pin, and a plurality of loading pin. The gripping pins are configured to grip a wafer during a cleaning process and the loading pins are configured to grip the wafer during a loading and unloading process. The cleaning module further comprises a sweep arm coupled to a nozzle mechanism configured to deliver liquids to the front and back side of the wafer.

Non-contact clean module

A processing device includes a sorting module, which adds to each of a plurality of elements a position value of a corresponding position in a register rest resulting in a plurality of transformed elements in corresponding positions. The plurality of elements include a plurality of bits. The sorting module compares each of the plurality of transformed elements to itself and to one another. The sorting module also assigns one of an enabled or disabled indicator to each of the plurality of the transformed elements based on the comparison. The sorting module further counts a number of the enabled indicators assigned to each of the plurality of the transformed elements to generate a sorted sequence of the plurality of elements.

Sorting data and merging sorted data in an instruction set architecture

Growing community of inventors

Santa Clara, CA, United States of America

Michael A Anderson