This inventor holds 6 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2008-2011.
Company Filing History:
Years Active: 2008-2011
Title: Micahel DeChellis: Innovator in Fluid Delivery Systems
Introduction
Micahel DeChellis is a prominent inventor based in Austin, TX (US). He has made significant contributions to the field of fluid delivery systems, particularly in semiconductor processing equipment. With a total of 6 patents to his name, DeChellis continues to push the boundaries of innovation in his industry.
Latest Patents
Among his latest patents is a method of attaching components to fluid delivery systems using diffusion bonding. This invention features a space-conserving integrated fluid delivery system that is particularly useful for gas distribution in semiconductor processing equipment. The design includes an integrated fluid flow network architecture, which may consist of a layered substrate containing fluid flow channels and various fluid handling and monitoring components. The layered substrate is diffusion bonded and can be partially or fully integrated into a processing chamber that also includes diffusion bonded layers.
Another notable patent by DeChellis is a method of increasing the etchability of metals with a chemical etching resistant microstructure. This invention also emphasizes a space-conserving integrated fluid delivery system, similar to his previous work, and includes an integrated fluid flow network architecture. The layered substrate in this patent is diffusion bonded, and the various fluid handling and monitoring components may be partially or fully integrated into the substrate, depending on design and material requirements.
Career Highlights
Micahel DeChellis is currently employed at Applied Materials, Inc., where he continues to develop innovative solutions in fluid delivery systems. His work has been instrumental in advancing technologies that enhance the efficiency and effectiveness of semiconductor processing.
Collaborations
Throughout his career, DeChellis has collaborated with notable colleagues, including Mark A Crockett and John William Lane. These partnerships have contributed to the development of cutting-edge technologies in the field.
Conclusion
Micahel DeChellis is a key figure in the innovation of fluid delivery systems, with a focus on semiconductor processing equipment. His patents reflect a commitment to advancing technology and improving efficiency in the industry.