The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 14, 2010
Filed:
Oct. 17, 2006
Mark Crockett, Foster City, CA (US);
John W. Lane, San Jose, CA (US);
Micahel Dechellis, Austin, TX (US);
Chris Melcer, Sunnyvale, CA (US);
Erica Porras, San Jose, CA (US);
Aneesh Khullar, Sunnyvale, CA (US);
Balarabe N. Mohammed, Union City, CA (US);
Mark Crockett, Foster City, CA (US);
John W. Lane, San Jose, CA (US);
Micahel DeChellis, Austin, TX (US);
Chris Melcer, Sunnyvale, CA (US);
Erica Porras, San Jose, CA (US);
Aneesh Khullar, Sunnyvale, CA (US);
Balarabe N. Mohammed, Union City, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded. Subsequent to diffusion bonding, a stainless steel diffusion bonded part may advantageously be treated to enhance corrosion resistance using a series of steps designed to bring more chromium to the surface of the steel.