Company Filing History:
Years Active: 2017-2025
Title: Merrett Wong: Innovator in Plasma Processing Technology
Introduction
Merrett Wong is a distinguished inventor based in San Carlos, California. He has made significant contributions to the field of plasma processing technology, holding a total of five patents. His innovative approaches have advanced the capabilities of etching processes in semiconductor manufacturing.
Latest Patents
Wong's latest patents include groundbreaking methods for controlling mask shape and enhancing selectivity in etching processes. One notable patent describes a method for performing an etch process on a substrate in a plasma processing system. This method involves applying source RF power and bias RF power to an electrode, utilizing pulsed signals that define multiple states within RF cycles. Another patent focuses on high aspect ratio etching, where pulsed RF signals are applied to an electrode, allowing for precise control over the power levels during the etching process.
Career Highlights
Merrett Wong is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work has been instrumental in developing advanced plasma processing techniques that enhance manufacturing efficiency and product quality.
Collaborations
Wong collaborates with talented professionals in his field, including Eric A. Hudson and Nikhil Dole. These partnerships foster innovation and drive advancements in plasma processing technology.
Conclusion
Merrett Wong's contributions to plasma processing technology through his patents and collaborations highlight his role as a key innovator in the semiconductor industry. His work continues to influence the future of etching processes and semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.