Mengnan Zou

Title: Mengnan Zou - Innovator in Semiconductor Technology

Introduction

Mengnan Zou is a prominent inventor based in Sunnyvale, CA, known for his contributions to semiconductor technology. He holds 2 patents that showcase his innovative approaches in the field. His work primarily focuses on methods for etching film stacks and developing ultraviolet light-emitting diode structures.

Latest Patents

One of Mengnan Zou's latest patents is titled "Bias voltage modulation approach for SiO/SiN layer alternating etch process." This patent describes a method for etching a film stack with high selectivity and low etch recipe transition periods. The method involves transferring a substrate with a film stack into a processing chamber, applying a first bias voltage, and etching an oxide layer before applying a second, higher bias voltage to etch a nitride layer.

Another significant patent is related to "Methods and systems for UV LED structures." This patent outlines exemplary processing methods for forming an LED structure, which includes depositing an aluminum nitride layer on a substrate and heating it to a temperature exceeding 1500° C. The methods also involve forming an ultraviolet light-emitting diode structure using advanced deposition techniques.

Career Highlights

Mengnan Zou is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to contribute significantly to advancements in semiconductor manufacturing processes.

Collaborations

Throughout his career, Mengnan has collaborated with notable colleagues, including Sean S Kang and Olivier Luere. These collaborations have further enhanced his innovative capabilities and contributions to the field.

Conclusion

Mengnan Zou's work in semiconductor technology, particularly in etching processes and LED structures, highlights his role as a key innovator in the industry. His patents reflect a commitment to advancing technology and improving manufacturing techniques.