Company Filing History:
Years Active: 2025
Title: Innovations of Mengistie Debasu
Introduction
Mengistie Debasu is a notable inventor based in Austin, TX (US). He has made significant contributions to the field of integrated circuit fabrication, particularly in the area of metal surface treatment. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of etching processes.
Latest Patents
Mengistie Debasu's latest patents include innovative methods for wet atomic layer etching of molybdenum. These methods utilize various techniques and wet etch chemistries to oxidize a molybdenum surface, forming a self-limiting molybdenum oxide passivation layer. The techniques involve ultra-violet (UV) photolysis of peroxide oxidizers, steric hindrance of large reactant molecules, and ligand-assisted oxidation. After forming the passivation layer, it can be selectively removed to etch the molybdenum surface effectively. Another significant patent focuses on selective removal of surface oxides on metal films. This patent provides new processes for pre-treating metal surfaces in the back end of line (BEOL) fabrication of integrated circuits. The methods utilize complexing agents to selectively dissolve native oxide surface layers without significantly etching the underlying metal film.
Career Highlights
Mengistie Debasu works at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His expertise in etching processes has contributed to advancements in integrated circuit technology.
Collaborations
He has collaborated with notable coworkers such as Paul Abel and Omid Zandi, further enhancing the innovative work being done at Tokyo Electron Limited.
Conclusion
Mengistie Debasu's contributions to the field of integrated circuits through his patents and collaborative efforts highlight his role as a significant inventor in the industry. His innovative methods continue to push the boundaries of technology in semiconductor manufacturing.