Company Filing History:
Years Active: 2019-2023
Title: Mayo Uda: Innovator in Plasma Processing Technology
Introduction
Mayo Uda is a prominent inventor based in Miyagi, Japan, known for her significant contributions to plasma processing technology. With a total of six patents to her name, she has made remarkable advancements in the field, particularly in the design and functionality of plasma processing apparatuses.
Latest Patents
One of her latest patents is a plasma processing apparatus that features an innovative antenna designed to generate plasma from a processing gas within a chamber. This apparatus includes an inner coil that surrounds a gas supply unit and an outer coil that encompasses both the gas supply unit and the inner coil. The outer coil is uniquely configured to resonate at a specific wavelength, enhancing the efficiency of plasma generation. Another notable patent is a plasma processing apparatus that incorporates a chamber with multiple gas inlet lines. These lines are strategically arranged to introduce gas into the plasma processing space from different directions, optimizing the processing capabilities.
Career Highlights
Mayo Uda has established herself as a key figure in her field through her work at Tokyo Electron Limited. Her innovative designs and patents have contributed to the advancement of plasma processing technologies, making her a valuable asset to her company and the industry.
Collaborations
Mayo has collaborated with notable coworkers, including Toshiki Nakajima and Keigo Toyoda, who have supported her in her research and development efforts.
Conclusion
Mayo Uda's contributions to plasma processing technology exemplify her innovative spirit and dedication to advancing the field. Her patents reflect her expertise and commitment to improving industrial processes through cutting-edge technology.