This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Ims Nanofabrication Gmbh. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Matthias Liertzer - Innovator in Charged-Particle Processing
Introduction
Matthias Liertzer is an inventor based in Hinterbrühl, Austria. He has made significant contributions to the field of charged-particle processing, particularly through his innovative methods for determining focal properties in multi-beam processing apparatuses. His work focuses on enhancing the precision and accuracy of imaging in these complex systems.
Latest Patent Applications
Matthias Liertzer has filed a patent application titled "Method for Determining Focal Properties in a Target Beam Field of a Multi-Beam Charged-Particle Processing Apparatus." This method involves determining focal properties related to aperture images formed by beamlets at or near the target within the apparatus. By adjusting the electrostatic voltage of a lens or other operating parameters, the landing angles of the beamlets can be tilted, leading to a small displacement of their impact points on the target surface. The application outlines a process for generating a mapping that correlates changes in landing angles to displacement amounts, which can be utilized to extract focal properties and correct imaging errors.
Conclusion
Matthias Liertzer's innovative approach to charged-particle processing represents a significant advancement in the field. His patent application showcases his commitment to improving imaging accuracy in complex systems.