Company Filing History:
Years Active: 2002-2005
Title: Innovations by Matthew Weldon: A Leader in Chemical-Mechanical Planarization
Introduction
Matthew Weldon is a prominent inventor based in Phoenix, AZ, who has made significant contributions to the field of chemical-mechanical planarization. With a total of three patents to his name, Matthew is recognized for his innovative approaches to wafer processing, which are critical in various high-tech industries.
Latest Patents
One of Matthew Weldon's most notable inventions is a multiprobe detection system for chemical-mechanical planarization tools. This invention presents a method and apparatus designed to planarize wafers efficiently. The system utilizes discrete measurements taken across the wafer's surface at a desired spatial density. Using a flash lamp, a light signal is reflected off the wafer's surface, which is then analyzed by a spectrometer that examines the reflected light.
The design incorporates multiple probes positioned at various locations to significantly reduce the time required for comprehensive measurements across the wafer's entire surface. This innovation allows for the sampling of multiple areas simultaneously, enhancing the overall efficiency of the process. A sophisticated control system receives these measurements and their corresponding locations, analyzing the data to identify areas on the wafer's surface that require adjustments in material removal rates. Subsequently, the control system can modify specific planarization parameters to optimize processes for both current and future wafers.
Career Highlights
Matthew Weldon is associated with Speedfam-IPEC Corporation, where he continues to push the boundaries of wafer processing technology. His work not only reflects his expertise but also showcases his commitment to innovation in this niche industry.
Collaborations
Throughout his career, Matthew has collaborated with talented engineers and fellow inventors, including colleagues like Thomas Laursen and Malcolm Grief. Together, they have contributed to advancements in wafer planarization technology, enhancing product quality and efficiency in manufacturing settings.
Conclusion
Matthew Weldon stands out as an influential inventor in the domain of chemical-mechanical planarization. His patented innovations, particularly the multiprobe detection system, demonstrate his dedication to improving wafer processing techniques. As he continues to work at Speedfam-IPEC Corporation, the technological advancements he contributes to will undoubtedly shape the future of the industry.