Matthew Minakais

Title: Innovations by Matthew Minakais in Semiconductor Photolithography

Introduction

Matthew Minakais is an accomplished inventor based in San Diego, CA. He has made significant contributions to the field of semiconductor photolithography, holding a total of 3 patents. His work focuses on enhancing the reliability and efficiency of light sources used in optical systems.

Latest Patents

One of Minakais' latest patents is titled "Maintenance of modules for light sources used in semiconductor photolithography." This invention involves systems for maintaining light sources where a module is evaluated at various pulse counts. The goal is to produce a binary prediction regarding the module's likelihood of operating without failure in subsequent pulses. A machine learning model, trained on metrics from deinstalled modules, aids in this predictive process. Additionally, a group of models can be tailored based on user selection or maintenance objectives.

Another notable patent is the "Predictive apparatus in a gas discharge light source." This apparatus includes a decision module that receives performance metrics related to an optical system emitting a light beam. It estimates the effectiveness of proposed changes to the optical system based on these metrics and outputs a change command if the proposed modification is deemed effective.

Career Highlights

Minakais is currently employed at Cymer, Inc., a leading company in the semiconductor industry. His innovative work has positioned him as a key figure in advancing technologies that improve the performance of light sources in photolithography.

Collaborations

Throughout his career, Minakais has collaborated with notable colleagues, including Russell Allen Burdt and Kumar Raja Guvindan Raju. These collaborations have further enriched his contributions to the field.

Conclusion

Matthew Minakais continues to push the boundaries of innovation in semiconductor photolithography through his patents and work at Cymer, Inc. His contributions are vital to the advancement of optical systems in the industry.