Company Filing History:
2 out of 441 
1 out of 9 Years Active: 2010-2012
Title: The Innovations of Masayuki Satou
Introduction
Masayuki Satou, an accomplished inventor residing in Shizuoka, Japan, has contributed significantly to the field of semiconductor technology. With two patents to his name, his inventions demonstrate a keen understanding of materials and processes aimed at enhancing semiconductor manufacturing.
Latest Patents
One of Masayuki Satou's notable patents is a method for surface treating semiconductors. This innovation involves dry etching a native oxide film on a silicon wafer at a temperature of 50°C or less. Following this, hydrogen treatment is conducted at a temperature of 100°C or above to bond the dangling bonds with hydrogen. This method utilizes a jig for loading the silicon wafers, ensuring efficiency during the removal of the native oxide film and subsequent hydrogen bonding.
His second patent features a vacuum processing apparatus designed for the seamless exchange of processing chambers. This apparatus includes a processing chamber and a fixed carrying-in-and-out chamber located above it. The design allows the processing chamber to be lowered through a vertically moving mechanism, simplifying the chamber exchange process compared to conventional systems.
Career Highlights
Masayuki has worked at notable companies such as Ulvac, Inc. and F.T.L. Co., Ltd. His involvement in these organizations has enabled him to apply his innovative ideas in real-world applications, significantly advancing semiconductor processing techniques.
Collaborations
Throughout his career, Satou has collaborated with distinguished colleagues like Seiichi Takahashi and Mikio Takagi. Their combined expertise and insights have likely contributed to the successful development of Masayuki’s patents.
Conclusion
Masayuki Satou's contributions to semiconductor technology underscore his role as a vital figure in the field of innovation. Through his patents, he has not only provided solutions to complex challenges faced in semiconductor manufacturing but has also paved the way for future advancements within the industry.