The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Dec. 28, 2006
Seiichi Takahashi, Shizuoka, JP;
Takehisa Miyaya, Shizuoka, JP;
Soo Boo Lim, Shizuoka, JP;
Masayuki Satou, Shizuoka, JP;
Kengo Tsutsumi, Shizuoka, JP;
Yohei Ono, Shizuoka, JP;
Seiichi Takahashi, Shizuoka, JP;
Takehisa Miyaya, Shizuoka, JP;
Soo Boo Lim, Shizuoka, JP;
Masayuki Satou, Shizuoka, JP;
Kengo Tsutsumi, Shizuoka, JP;
Yohei Ono, Shizuoka, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.