Masaya Odagiri is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of five patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing systems.

Latest Patents

Masaya Odagiri's latest patents include innovative designs for a substrate stage, a substrate processing apparatus, and a substrate processing system. The substrate stage is designed for mounting a substrate and features a peripheral stage member that controls the temperature of the peripheral substrate portion. Additionally, a central stage member is included to manage the temperature of the central substrate portion. A gap is formed between these two members to prevent contact, ensuring optimal performance. The substrate processing apparatus is equipped with a processing chamber capable of being depressurized. It includes a substrate placing table and a baffle plate that divides the chamber into processing and exhaust spaces. Communication holes in the baffle plate facilitate the interaction between these spaces, enhancing the processing capabilities.

Career Highlights

Masaya Odagiri is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to develop and refine his innovative ideas in substrate processing technology.

Collaborations

Some of Masaya Odagiri's notable coworkers include Yusuke Muraki and Jin Fujihara. Their collaboration has contributed to the advancement of technology in their field.

Conclusion

Masaya Odagiri is a key figure in the realm of substrate processing technology, with a strong portfolio of patents that reflect his innovative spirit. His contributions continue to influence the industry and pave the way for future advancements.

This text is generated by artificial intelligence and may not be accurate.

Please report any incorrect information to support@idiyas.com