This inventor holds 1 USPTO granted patent. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Masato Obara: Inventor in Substrate Processing
Introduction
Masato Obara is an inventor associated with Miyagi, Japan, and Tokyo Electron Limited. His work includes a patent concerning substrate processing systems and particle removal.
Latest Patents
The provided information lists one patent for Masato Obara: “Substrate Processing System and Particle Removal Method.” The invention describes a system with vacuum and atmospheric transfer modules, a substrate processing module, a load-lock module, and substrate transfer robots equipped with end effectors. A controller manages particle removal by moving an end effector through one of the system’s modules while a charged member is placed on it. The listed patent count is 1 patent.
Career Highlights
Obara is associated with Tokyo Electron Limited, a company involved in semiconductor manufacturing equipment. His listed patent focuses on removing particles from substrate-processing equipment.
Collaborations
Naoki Sato is identified as Obara’s coworker. The provided information does not specify whether Sato collaborated on the patent.
Conclusion
Masato Obara’s listed invention addresses particle removal in substrate-processing systems and reflects his association with Tokyo Electron Limited.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile