This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Masashi Shimoda: Inventor of an Electrostatic Chuck Design.
Introduction
Masashi Shimoda is an inventor associated with Miyagi, Japan. His patent work includes a design for an electrostatic chuck and related substrate-processing equipment. The available information lists 1 patent and identifies Tokyo Electron Limited as his company.
Latest Patents
Shimoda’s listed patent is “Electrostatic Chuck, Substrate Support, and Substrate Processing Apparatus.” It describes an electrostatic chuck with a central region that supports a substrate and includes at least one through-hole. A first substrate contact portion surrounds the through-hole, while a second contact portion surrounds the first. Both portions have protrusions extending upward from the central region. The protrusions are arranged at a higher density in the first contact portion than in the second.
Career Highlights
Shimoda’s listed invention addresses the structure of a substrate-supporting electrostatic chuck. The patent also covers a substrate support and a substrate-processing apparatus incorporating the design. His company is Tokyo Electron Limited.
Collaborations
Yasuharu Sasaki is identified as Shimoda’s coworker. The available information does not specify a particular patent collaboration between them.
Conclusion
Masashi Shimoda’s listed patent focuses on an electrostatic chuck with differently spaced protrusions across two substrate contact portions, connecting his inventive work with Tokyo Electron Limited’s semiconductor-processing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile