This inventor holds 4 USPTO granted patents and 6 published patent applications. Top assignee: Ebara Corporation. Active years: 2023-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2023-2026
Title: Masashi Kabasawa: Innovator in Polishing Technology
Introduction
Masashi Kabasawa is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of polishing technology, particularly in the semiconductor industry. With a total of 4 patents to his name, Kabasawa's work focuses on enhancing the efficiency and effectiveness of polishing methods and apparatus.
Latest Patents
Kabasawa's latest patents include a polishing method and a polishing apparatus. The polishing method he developed allows for the termination of polishing a substrate, such as a wafer, at a preset polishing time. This method involves pressing the substrate against a polishing surface while regulating the temperature of the polishing surface using a heat exchanger. It also includes calculating a target polishing rate to ensure that the actual polishing time aligns with the target polishing time. Additionally, the method determines a target temperature for the polishing surface to achieve the desired polishing rate.
The polishing apparatus he designed is capable of regulating the surface temperature of the polishing pad without causing defects, such as scratches, on the substrate. This apparatus features a non-contact type pad-temperature regulating device and a pad-temperature measuring device, which work together to maintain optimal conditions during the polishing process.
Career Highlights
Masashi Kabasawa is currently employed at Ebara Corporation, a leading company in the field of precision equipment and technology. His work at Ebara has allowed him to focus on innovative solutions that address the challenges faced in the polishing process within the semiconductor industry.
Collaborations
Kabasawa has collaborated with notable colleagues, including Keisuke Kamiki and Yasuyuki Motoshima. These collaborations have contributed to the advancement of polishing technologies and have fostered a productive environment for innovation.
Conclusion
Masashi Kabasawa's contributions to polishing technology have made a significant impact in the semiconductor industry. His innovative methods and apparatus continue to enhance the efficiency of polishing processes, showcasing his dedication to advancing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile