Masaru Hori

Title: Masaru Hori: Innovator in Etching Technology

Introduction

Masaru Hori is a notable inventor based in Aichi, Japan. He has made significant contributions to the field of etching technology, holding 2 patents that showcase his innovative approaches. His work primarily focuses on methods and apparatuses for selective etching processes.

Latest Patents

Hori's latest patents include an etching method and an etching apparatus. The etching method involves a technique for the selective removal of a titanium aluminum carbide film against titanium aluminum nitride films. This is achieved by utilizing near atmospheric pressure plasma, which serves as a rich non-halogen radical source. The method produces various radicals, such as NH, H, CH, N, Ar, OH, and O, from argon and liquid vapor for film surface modification. The modified layer can form volatile products that are easily removed by heating. Additionally, his etching technique provides higher uniformity of etching amounts and a greater yield in etching processing. This method focuses on etching a film layer containing nitride of transition metal, which is disposed on a wafer's surface. It includes supplying reactive particles containing fluorine and hydrogen, while excluding oxygen, to form a reaction layer on the film surface, followed by eliminating the reaction layer through heating.

Career Highlights

Throughout his career, Masaru Hori has worked with prominent companies such as Hitachi High-Tech Corporation and Toyota Motor Corporation. His experience in these organizations has allowed him to refine his skills and contribute to advancements in etching technology.

Collaborations

Hori has collaborated with notable coworkers, including Kazunori Shinoda and Hirotaka Hamamura. Their combined expertise has likely fostered innovative solutions in their respective fields.

Conclusion

Masaru Hori's contributions to etching technology through his patents and career experiences highlight his role as an influential inventor. His innovative methods continue to impact the industry positively.